BaTiO3 thin films with a tetragonal symmetry were grown on (001) SrTiO3 single crystal substrates by pulsed laser ablation (PLD). The evolution of the growth front was monitored in-situ and in real time by means of high-pressure reflection high-energy electron diffraction (RHEED), while atomic force microscopy (AFM) and scanning electron microscopy (SEM) were used to analyze the surface morphology. The films microstructure, substrate-film interface properties, and the type and level of epitaxial strain were determined by X-ray diffraction (XRD) studies. RHEED data showed that under optimum deposition conditions the films grow following a Stransky-Krastanov mechanism. The films morphology and microstructure is strongly dependent on the deposition and post-deposition vacuum annealing parameters, as well as on the substrate-film interface properties.    

 

 

 

 

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